Semiconductor Ultra-pure Water System

Ultra-pure water system for electronics and semiconductor industries consists of four core steps: pretreatment, reverse osmosis, ultra-purification and post-treatment. QILEE customizes ultra-pure water system of various flow rates and outlet water quality as per client requirements.

• ≥18 mω resistivity

• <5 ppb toc

• <0.1 ppb silica

Advantages of Our Semiconductor Ultra-pure Water System

The system adopts modular design with advanced water treatment technology of double-stage RO + EDI + mixed bed. It is designed in strict accordance with the latest technical standards to guarantee stable water quality and long-term reliable operation.

Professional engineering design ensures stable water quality during both short-term and long-term system shutdowns.

Specialized technology maintains constant pressure and stable water quality for the final outlet water.

Sophisticated technologies maximize the system recovery rate and reduce energy consumption and operating costs.

Low-pressure RO membranes are applied for stable operation with low energy consumption.

A pH adjustment system is equipped to secure EDI effluent quality when water temperature drops or raw water pH is low.

A dedicated chemical cleaning system is provided for regular chemical cleaning of reverse osmosis membranes to maintain stable system operation.

Professional concentrate water displacement technology is adopted to prevent microbial contamination of the membrane system.

UPW-specified piping is used for EDI and downstream effluent to maximally preserve the outlet water quality.

The EDI water tank is fitted with a nitrogen blanketing unit to stabilize final water quality and extend the service life of the nuclear-grade mixed bed.

Process Flow

1. Traditional water treatment method using ion exchange resin to produce ultra-pure water for the electronics industry.

Its basic process flow:

● Raw Water → Multi-media Filter → Activated Carbon Filter → Cartridge Filter → Intermediate Water Tank → Cation Bed → Anion Bed → Mixed Bed (Dual Bed) → Ultra-pure Water Tank → UPW Pump → Post Security Filter → Point of Use

2. Combined method of reverse osmosis water treatment equipment and ion exchange equipment for ultra-pure water production for electronics industry.

Its basic process flow:

● Raw Water → Multi-media Filter → Activated Carbon Filter → Cartridge Filter → Intermediate Water Tank → Reverse Osmosis System → Mixed Bed (Dual Bed) → Ultra-pure Water Tank → UPW Pump → Post Security Filter → Point of Use

3. Ultra-pure water production by combining reverse osmosis system with Electrodeionization (EDI). This is an eco-friendly, cost-effective UPW production process with great development potential.

Its basic process flow:

● Raw Water → Multi-media Filter → Activated Carbon Filter → Cartridge Filter → Intermediate Water Tank → Reverse Osmosis System → Electrodeionization (EDI) → Ultra-pure Water Tank → UPW Pump → Post Security Filter → Point of Use

Real Systems, Real Performance

Factory photos of QILEE EDI systems built and tested at our Shanghai facility before shipment.

DI 2-Module System

SS316L skid • Dual EDI modules • Integrated control panel • Resistivity monitoring

EDI 4-Module Large-Scale System

4 × EDI modules • Power distribution cabinet • Multi-channel resistivity display • Auto alarm

Application Fields

Water for cleaning electronic and semiconductor materials, components, aluminum foils and workpieces in electrolytic capacitor manufacturing;

Process water for picture tube and fluorescent screen production, including glass bulb cleaning, precipitation, wetting, film washing and tube diameter cleaning;

Solution preparation water for cleaning during liquid crystal display manufacturing;

In electronic chip production, mainly used for silicon wafer cleaning, with a small portion for chemical solution preparation and slicing;

High-purity water for silicon wafer cleaning in IC manufacturing, as well as water for high-quality picture tube and phosphor production;

Process water for LCD, LED and PDP plasma display panels;

Water for photovoltaic wafer slicing and optoelectronic product manufacturing;

Production water for storage batteries, lithium batteries and solar cells;

Surface treatment water for electroplating, coating, automotive, metal and other high-end precision machinery & micro-precision products;

Laboratory water for research institutes in metal, chemical, biological and other fields;

Production & processing water for military enterprises and research institutions in aerospace, astronomy, nuclear power sectors.

Core Industry Specifications

Semiconductor IC / DRAM / NAND

Compliant with SEMI F63, 18 MΩ·cm, for wafer cleaning

Display Panels LCD / OLED

Glass substrate cleaning, low silica requirement

Solar PV TOPCon / HJT

Silicon wafer texturing & coating; affects minority carrier lifetime

Pharmaceutical & Biotechnology

USP purified water, endotoxin ＜0.001 EU/mL

Boiler Feed Water (BFW) for power industry

Conductivity ＜0.1 μS/cm, mixed bed replacement, 50% OPEX reduction

Laboratory & Analytical Testing

HPLC / ICP-MS / cell culture, ISO 3696 Grade 1

PCB & Electronic Components

Resistivity ＞10 MΩ·cm, copper plating cleaning

Green Hydrogen PEM Electrolyzer

Conductivity ＜1 μS/cm, MEA protection

QILEE EDI vs. Conventional Alternatives

Criteria	QILEE RO + EDI	Mixed-Bed IEX	Conventional RO Only
Product resistivity	✅ ≥18 MΩ·cm guaranteed	⚠️ 10–18 MΩ·cm (degrades)	❌ ~0.05–1 MΩ·cm
Chemical regeneration	✅ None — DC current only	❌ Acid + caustic, every 2–3 weeks	✅ None
Operational continuity	✅ 24/7 uninterrupted	❌ 4–8 hr downtime per cycle	✅ Continuous
OPEX (chemicals)	✅ Near zero	❌ USD 20,000–80,000/yr	✅ Low (antiscalant only)
TOC removal	✅ <5 ppb (UV + EDI)	⚠️ Partial (depends on resin)	❌ Limited
SEMI F63 compliance	✅ Full compliance	⚠️ Only when freshly regenerated	❌ Not applicable
Hazardous waste	✅ None	❌ Acid + caustic effluent	⚠️ Concentrate only
Footprint	✅ Compact skid / 40HQ	⚠️ Large (vessel + chemical tanks)	✅ Compact

Get your free technical proposal in 48 hours

Send us your feed water analysis and flow requirements. our engineers will design a system and send you a detailed technical proposal with sizing, p&id sketch, and budgetary price, at no cost, no obligation.

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